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FLEX CELL定制系統
| 懸掛式構架設計: | 各控制軸採用閉環控制無刷直流伺服馬達帶光柵解碼器和精密滾珠絲杆滑軌 |
| 工作範圍: | 500mm/600mm/800mm |
| XYZ 重複精度: | ±25 微米 (±0.001 in) |
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