| Inspection Application (2D+3D) | Geometric coordinates measurement, e.g. CPU socket, Packaging, Solder Bumps, Parts, etc. |
| Inspection speed (2D+3D): | 50cm2/sec to 15 cm2/sec (depends on MRS sensor type) |
| Minimum features size: | 100μm or 70 μm (depends on MRS sensor type) |
| XY R&R@1σ: | <3μm or <2μm (depends on MRS sensor type) |
| Z R&R@1σ: | <2μm |
| Accuracy XY: | 6μm or 5μm (depends on MRS sensor type) |
| Accuracy Z: | 2μm |
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